Research Alliance Between University of Groningen and ASML Strengthens Dutch Semiconductor Innovation Infrastructure

Jouke de Vries and Richard Kemkers

(IN BRIEF) The University of Groningen and ASML have signed a framework agreement to expand research collaboration in semiconductor-related technologies, including advanced materials, flow processes, coatings and next-generation chip manufacturing techniques. The framework enables faster launch of joint research projects and builds on years of cooperation through ARCNL and recent student-industry initiatives like ASML Day in Groningen. The signing took place in Veldhoven, attended by UG leadership and ASML’s research division. The partnership strengthens existing work related to EUV lithography using UG’s Zernike-LEIF ion beam facility, while new projects target even finer chip patterning technologies. The agreement also aligns with national engineering talent development programmes, including the Beethoven initiative, supporting future workforce readiness for the Dutch high-tech chip sector.

(PRESS RELEASE) VELDHOVEN, 5-Dec-2025 — /EuropaWire/ — The University of Groningen (UG) and ASML have formalised a new framework agreement designed to deepen their research collaboration, expanding their work across advanced materials, flow processes, semiconductor manufacturing technologies, and advanced control systems. The agreement builds on years of cooperation between the university’s Faculty of Science & Engineering and ASML, opening the way for faster project initiation and more extensive joint innovation relevant to next-generation chip production.

The agreement was officially signed during a meeting at ASML’s headquarters in Veldhoven, following presentations from Joost Frenken, Dean of the Faculty of Science & Engineering at UG, and Maarten Voncken, Head of Research Metrology at ASML. UG Chair of the Board Jouke de Vries and ASML Head of Research Richard Kemkers signed the framework to mark the start of an enhanced strategic partnership.

Collaboration between the parties has grown steadily since early involvement through ARCNL (Advanced Research Center for Nanolithography), where researcher Ronnie Hoekstra first initiated ties in 2014. Their partnership was strengthened further during ASML Day held in Groningen in 2023, which connected students to the semiconductor industry and launched exploratory discussions for intensified R&D cooperation.

Under the new agreement, research areas will expand through shared projects that support ASML’s EUV lithography and future semiconductor manufacturing platforms. Recent work using UG’s Zernike-LEIF ion beam facility has already contributed valuable findings for advanced chip patterning. New joint research efforts are underway in fields including materials development, coatings, fluid dynamics and technologies that enable more precise chip manufacturing. Groningen will bring key strengths such as its CogniGron expertise and advanced AI research infrastructure.

In addition to research, the partnership supports long-term talent development for the Dutch high-tech ecosystem. UG is a contributor to the national Beethoven programme, alongside TU Delft, TU Eindhoven, University of Twente and partners across the northern Netherlands — an initiative aimed at preparing more engineers and scientists for careers in next-generation microchip innovation.

UG Chair Jouke de Vries described the framework as a milestone that anchors the university’s contribution to semiconductor innovation, while ASML’s Richard Kemkers welcomed the agreement as a foundation for future projects that accelerate knowledge transfer and enable fast, innovative collaboration.

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email: communicatie@rug.nl

SOURCE: University of Groningen