University of Southampton Opens World-Leading E-Beam Lithography Facility to Accelerate Semiconductor Innovation

University of Southampton Opens World-Leading E-Beam Lithography Facility to Accelerate Semiconductor Innovation

(IN BRIEF) The University of Southampton’s new E-beam lithography facility, which is the second of its kind globally, will significantly advance semiconductor technology in the UK. The facility, which provides unmatched accuracy in designing the components of future technologies, supports the growing semiconductor sector, projected to contribute £17 billion annually to the UK economy by 2030. The facility also coincides with the launch of a £4.75 million semiconductor skills package aimed at addressing talent shortages in the industry.

(PRESS RELEASE) SOUTHAMPTON, 30-Apr-2025 — /EuropaWire/ — The University of Southampton has officially opened a state-of-the-art E-beam lithography facility, heralded as the second of its kind globally and the first outside Japan. The facility, unveiled by Science Minister Lord Patrick Vallance, represents a major leap forward in semiconductor research and development. With its unparalleled precision, this new technology is set to revolutionize the creation of tiny semiconductor components that power a wide range of future technologies, including medical diagnostics and defense systems.

Semiconductors are crucial to a broad spectrum of devices, from smartphones to satellites, contributing £10 billion annually to the UK economy. With projections indicating the sector will grow to £17 billion by 2030, the new E-beam lithography facility positions the University of Southampton at the forefront of the semiconductor revolution.

Professor Anna Peacock, Executive Officer Osamu Wakimoto from Jeol Japan, Science Minister Lord Patrick Vallance, Vice-Chancellor Professor Mark E. Smith and Professor Graham Reed

Lord Vallance, joined by University Vice-Chancellor Professor Mark E. Smith and Professor Graham Reed, who leads the Optoelectronics Research Centre (ORC) and CORNERSTONE, highlighted the facility’s potential to fuel the UK’s ambition to develop next-generation chips. The facility’s E-beam technology uses electron beams to create intricate patterns in materials, achieving a resolution thousands of times smaller than a human hair.

“This new facility is a critical asset in advancing the UK’s semiconductor industry,” said Lord Vallance. “It will strengthen our national capabilities, foster innovation, and support the development of high-value chips right here in the UK.”

The launch of the E-beam facility coincides with a new government initiative aimed at addressing talent shortages in the semiconductor industry. Research highlights that a lack of emerging talent is one of the biggest barriers to growth, despite the high economic value of the sector. In response, the government has introduced a £4.75 million semiconductor skills package to bridge this gap, ensuring that the UK can maintain its leadership in semiconductor innovation.

Professor Graham Reed emphasized the importance of the facility in reinforcing the UK’s position as a hub for advanced semiconductor research. “This facility enhances our cleanroom capabilities and supports a range of innovative research and vital semiconductor skills training.”

With the opening of the E-beam facility, the University of Southampton is poised to continue its vital role in driving semiconductor advancements in the UK, supported by cutting-edge infrastructure and a growing pool of skilled talent.

Media Contact:

Tel. +44 (0)23 8059 3212
Email: press@southampton.ac.uk

SOURCE: University of Southampton

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