Empa Unveils Synchronized Floating Potential HiPIMS Method for Advanced Piezoelectric Thin Films at Low Temperatures

Empa Unveils Synchronized Floating Potential HiPIMS Method for Advanced Piezoelectric Thin Films at Low Temperatures

(IN BRIEF) Researchers at Empa have developed a revolutionary process for producing high-quality piezoelectric thin films at low temperatures using the Synchronized Floating Potential HiPIMS (SFP-HiPIMS) method. This process enables the production of piezoelectric films on insulating substrates, which are essential for semiconductor devices, without compromising quality. The technique, which involves precise timing to accelerate ions and avoid contamination, opens up new possibilities for applications in semiconductor, quantum, and photonics technologies. Empa’s innovation is poised to improve manufacturing processes in a variety of high-tech industries.

(PRESS RELEASE) DÜBENDORF, 4-Jun-2025 — /EuropaWire/ — Researchers at Empa, the Swiss Federal Laboratories for Materials Science and Technology, have developed a groundbreaking process for manufacturing high-quality piezoelectric thin films using the HiPIMS (High Power Impulse Magnetron Sputtering) technique. The new method, called Synchronized Floating Potential HiPIMS (SFP-HiPIMS), relies on precise timing to prevent unwanted contamination while ensuring superior quality films are produced at lower process temperatures. This advance has potential applications in the semiconductor industry, as well as in the rapidly developing fields of quantum and photonics technologies.

The team led by Empa researchers Jyotish Patidar (left) and Sebastian Siol has enabled the production of high-quality piezoelectric thin films using the HiPIMS process through clever timing. Image: Empa

Piezoelectric thin films are critical components in many everyday electronic devices, such as smartphones, where they function as RF filters and sensors. These films convert mechanical stress into electrical energy and vice versa, making them vital for many microelectronic components. However, for such thin films to operate effectively, they need to be of exceptionally high quality. Traditional manufacturing methods, which often require high temperatures, are not suitable for all types of components, especially those that are sensitive to heat.

Empa researchers have taken a novel approach by improving the HiPIMS process to produce piezoelectric films of unprecedented quality on insulating substrates, such as glass or sapphire. These substrates are essential in semiconductor production but are challenging for thin film deposition, as they do not conduct electricity. The breakthrough came through precise timing: the researchers discovered that by carefully synchronizing the application of voltage, they could selectively accelerate ions while avoiding the incorporation of harmful argon ions into the films.

“We’re very excited about the results of this method, which not only allows for high-quality piezoelectric thin films on insulating substrates but also does so at low temperatures—an important factor for many semiconductor components,” said Sebastian Siol, a lead researcher at Empa. “This innovation opens up new possibilities for industries where traditional high-temperature processes are not feasible.”

The SFP-HiPIMS technique is particularly advantageous for the semiconductor industry, where many production tools cannot apply an electrical voltage to the substrate. This limitation has now been overcome with the new process, making it possible to create high-performance thin films that are vital for future technologies, including quantum computing and advanced photonics.

Empa’s research team has published their findings in Nature Communications and has applied for a patent for their innovative process. Their next steps include further development of ferroelectric thin films, another critical technology for electronics, and launching collaborative projects with other research institutions. The team is also exploring the use of machine learning and high-throughput experiments to further optimize the SFP-HiPIMS process.

Media Contacts:

Dr. Sebastian Siol
Coating Technologies
Phone +41 58 765 43 80
sebastian.siol@empa.ch

Anna Ettlin
Communications
Phone +41 58 765 47 33
redaktion@empa.ch

SOURCE: EMPA