ASML and TU/e to jointly develop new cleanroom space for academic research

ASML and TU/e to jointly develop new cleanroom space for academic research

(IN BRIEF) ASML and Eindhoven University of Technology (TU/e) have agreed to jointly develop a 10-year strategic research plan in plasma physics, artificial intelligence, mechatronics and semiconductor lithography. Both parties will invest equally in the joint programme, which will create up to 40 PhD positions yearly. The agreement also includes the construction of a new ASML research facility on the TU/e campus, including a state-of-the-art cleanroom facility. The new cleanroom facility will have analytical and production equipment in an open-access research laboratory available to TU/e, other research centres and industrial partners. The facility is expected to cost several hundred million euros and accommodate over 500 researchers, including hundreds of ASML employees.

(PRESS RELEASE) EINDHOVEN, 25-Apr-2023 — /EuropaWire/ — ASML and Eindhoven University of Technology (TU/e) announced a new phase in their longstanding partnership. This includes a jointly defined research program, the construction of a new ASML research facility on the TU/e campus, including the creation of a state-of-the-art cleanroom.

The two parties signed a memorandum of understanding to jointly develop a 10-year strategic research road map in the fields of plasma physics, artificial intelligence, mechatronics and semiconductor lithography. The TU/e and ASML will invest substantially and equally in the joint program. The newly created program will together create up to 40 PhD positions yearly, for which the TU/e will recruit internationally renowned top scientific talents. In turn, ASML will supply its top engineers as hybrid teachers in these areas and will increase the number of internships it hosts. This approach will scale up the already proven and longstanding close collaboration between the TU/e and ASML, bringing together the best in science and engineering in Brainport Eindhoven.

New research facility

Additionally, ASML announced that TU/e is in the process of granting a long-term lease on the TU/e campus to realize a new ASML research facility in the coming years, where the company intends to co-locate the many competences of its Research team. The new facility will also have shared workspaces, meeting rooms, research labs and a state-of-the-art cleanroom facility. The new cleanroom facility will also include analytical and production equipment in an open-access research laboratory that is also available to TU/e, to other research centers and industrial partners. This collaborative cleanroom space will enable growth and synergy across academic research fields of mutual interest such as photonics, quantum computing, nano materials and chip manufacturing. In addition, the facility will include substantial cleanroom space dedicated to TU/e exclusively. This space will be rented long-term to TU/e, for fundamental research in the same and related areas.

The realization of the envisioned facility involves an estimated investment of several hundred million euros. It is intended to provide space for more than five hundred researchers, including several hundred ASML employees.

Fundamental science and industrial engineering

Jos Benschop, Senior Vice President Technology at ASML said, “Our relationship with Eindhoven University of Technology goes back to the earliest days of ASML. Our collaboration is based on a shared commitment to create meaningful innovation for society by bridging fundamental science and industrial engineering. This next step in our partnership shapes a brighter future for the Brainport region.”

Robert-Jan Smits, President of the Executive Board of the Eindhoven University of Technology, said, “We are very happy to strengthen our collaboration with ASML, one of the world’s leading technology companies and a R&D powerhouse. This collaboration is in the university’s DNA and in line with our strategy. We are an international top university with strong roots in Brainport Eindhoven. We have a leading position in industrial collaboration that we want to expand further. This provides enormous opportunities for the university, for scientists and for students. It will also help us attract talented researchers from around the world, which is crucially important for Brainport Eindhoven, The Netherlands and Europe.”

Media Contact:

Frans Raaijmakers
Science Information Officer
+31 40-247 4101
 h.a.raaijmakers@tue.nl

SOURCE: TU/e