ASML and Intel Advance Semiconductor Scaling With High NA EUV Manufacturing Milestone

ASML and Intel Advance Semiconductor Scaling With High NA EUV Manufacturing Milestone

(IN BRIEF) ASML has announced that Intel Foundry is using its EXE High NA EUV lithography technology in high-volume manufacturing for selected layers of Intel® Core™ Ultra Series 3 processors, code-named Panther Lake, built on the Intel 18A process node. The milestone shows that High NA EUV is moving from development into production use. Selected Intel 18A layers have been dual-qualified on High NA EUV in Oregon, with products shipping to customers at yields matched to the NXE platform. ASML and Intel said the work provides important production data for system setup, uptime and manufacturing implementation, helping support broader adoption of High NA EUV in future nodes. Intel Foundry is the first company to ship a high-volume logic product using High NA EUV.

(PRESS RELEASE) VELDHOVEN, 16-Jul-2026 — /EuropaWire/ — ASML Holding N.V. has announced a new milestone for High NA EUV lithography, with Intel Foundry using ASML’s EXE High NA EUV technology in high-volume manufacturing for a subset of Intel® Core™ Ultra Series 3 processors, code-named Panther Lake.

The processors are being manufactured on the Intel 18A process node, with selected Intel 18A layers dual-qualified on High NA EUV in Oregon. The products are now shipping to customers at yields matched to the existing NXE platform, marking an important step in proving the readiness of High NA EUV technology in a production environment.

ASML and Intel have worked together for decades to advance lithography technology and support the continued scaling of semiconductors. High numerical aperture extreme ultraviolet lithography represents the next major stage in EUV development, enabling more precise patterning for advanced chip production.

The use of High NA EUV on specific Panther Lake layers gives ASML and Intel Foundry valuable manufacturing data to further optimise system setup, uptime and production implementation. The companies said this work helps pave the way for broader adoption of the technology and fuller use of its capabilities in future nodes, depending on customer requirements.

Christophe Fouquet, President and Chief Executive Officer of ASML, said the introduction of High NA EUV represents a significant development in semiconductor lithography.

“With increased resolution and better process control, the introduction of High NA EUV marks a substantial development in semiconductor lithography,” said Fouquet.

He added that ASML is proud to support the smaller and denser patterning needed to accelerate progress in artificial intelligence and other emerging technologies.

Naga Chandrasekaran, Executive Vice President and General Manager of Intel Foundry, said the milestone reflects the close technical collaboration between Intel and ASML.

“This milestone reflects the close technical collaboration between Intel and ASML and shows how High NA EUV can be integrated into advanced semiconductor manufacturing at scale,” said Chandrasekaran.

He said qualifying the High NA EUV process option on selected Intel 18A product layers allows Intel Foundry’s existing tool fleet to provide customers with increased output, while the company develops future options for leading-edge performance, density and manufacturing flexibility on upcoming nodes.

In 2024, Intel and ASML completed the integration of the industry’s first commercial High NA EUV lithography system at Intel’s research and development site in Hillsboro, Oregon.

Intel Foundry was also the first company to install and pass acceptance testing of the second-generation TWINSCAN EXE:5200B, which builds on the TWINSCAN EXE:5000 platform with higher output, improved overlay accuracy and an enhanced light source.

With this latest announcement, Intel Foundry has become the first company in the industry to ship a high-volume logic product manufactured using High NA EUV.

About ASML

ASML is a leading supplier to the semiconductor industry. The company provides chipmakers with hardware, software and services to mass produce the patterns of integrated circuits (microchips). Together with its partners, ASML drives the advancement of more affordable, more powerful, more energy-efficient microchips. ASML enables groundbreaking technology to solve some of humanity’s toughest challenges, such as in healthcare, energy use and conservation, mobility and agriculture. ASML is a multinational company headquartered in Veldhoven, the Netherlands, with offices across EMEA, the US and Asia. Every day, ASML’s more than 44,500 employees (FTE) challenge the status quo and push technology to new limits. ASML is traded on Euronext Amsterdam and NASDAQ under the symbol ASML. Discover ASML – our products, technology and career opportunities – at www.asml.com.

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SOURCE: ASML